A Review on Machine and Deep Learning for Semiconductor Defect Classification in Scanning Electron Microscope Images

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Authors: López de la Rosa, F.; Sánchez-Reolid, R.; Gómez-Sirvent, J.L.; Morales, R.; Fernández-Caballero, A.

Journal title: applied science

Journal number: 20763417

Journal publisher: MDPI

Published year: 2021

DOI identifier: 10.3390/app11209508

ISSN: 2076-3417