Deposition, Characterization, and Performance of Spinel InGaZnO4

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Authors: Hendrik F. W. Dekkers, Michiel J. van Setten, Attilio Belmonte, Adrian V. Chasin, Subhali Subhechha, Nouredine Rassoul, Anastasia V. Glushkova, Romain Delhougne, and Gouri Sankar Kar

Journal title: 2022 ACS Applied Electronic Materials

Journal number: 26376113

Journal publisher: American Chemical Society

Published year: 2022

Published pages: pp. 1238–1249

DOI identifier: 10.1021/acsaelm.1c01315

ISSN: 2637-6113