Systematic Study on the Amorphous, C-Axis-Aligned Crystalline, and Protocrystalline Phases in In–Ga–Zn Oxide Thin-Film Transistors


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Authors: Anastasia V. Glushkova, Harold F. W. Dekkers, Manoj Nag, Jose Ignacio del Agua Borniquel, Jothilingam Ramalingam, Jan Genoe, Paul Heremans, and Cedric Rolin

Journal title: 2021 ACS Applied Electronic Materials

Journal number: 26376113

Journal publisher: American Chemical Society

Published year: 2021

Published pages: pp. 1268 - 1278

DOI identifier: 10.1021/acsaelm.0c01091

ISSN: 2637-6113