Recent Progresses and Perspectives of UV Laser Annealing Technologies for Advanced CMOS Devices

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Authors: Toshiyuki Tabata, Fabien Rozé, Louis Thuries, Sébastien Halty, Pierre-Edouard Raynal, Imen Karmous and Karim Huet

Journal title: Electronics

Journal number: 20799292

Journal publisher: MDPI

Published year: 2022

Published pages: 2636

DOI identifier: 10.3390/electronics11172636

ISSN: 2079-9292