Uncertainties in the reconstruction of nanostructures in {EUV} scatterometry and grazing incidence small-angle X-ray scattering

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Authors: A. Fernández Herrero, M. Pflüger, J. Puls, F. Scholze, V. Soltwisch

Journal title: Optics Express

Journal number: 10944087

Journal publisher: Optical Society of America

Published year: 2021

Published pages: 35580-35591

DOI identifier: 10.1364/oe.430416

ISSN: 1094-4087

Metrology Advances for Digitized ECS industry 4.0
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