Shape- and Element-Sensitive Reconstruction of Periodic Nanostructures with Grazing Incidence X-ray Fluorescence Analysis and Machine Learning.

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Authors: Anna Andrle; Philipp Hönicke; Grzegorz Gwalt; Philipp-Immanuel Schneider; Yves Kayser; Frank Siewert; Victor Soltwisch

Journal title: Nanomaterials

Journal number: 20794991

Journal publisher: MPDI

Published year: 2021

Published pages: 1647

DOI identifier: 10.48550/arxiv.2102.06600

ISSN: 2079-4991

Metrology Advances for Digitized ECS industry 4.0
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