A deep residual neural network for semiconductor defect classification in imbalanced scanning electron microscope datasets

Summary

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Authors: Francisco López de la Rosa, José L. Gómez-Sirvent, Rafael Morales, Roberto Sánchez-Reolid, Antonio Fernández-Caballero,

Journal title: Applied Soft Computing

Journal number: 15684946

Journal publisher: Elsevier BV

Published year: 2022

DOI identifier: 10.1016/j.asoc.2022.109743

ISSN: 1568-4946