Integration of BEoL Compatible 1T1C FeFET Memory Into an Established CMOS Technology

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Authors: D. Lehninger, H. Mähne, T. Ali, R. Hoffmann, R. Olivo, M. Lederer, K. Mertens, T. Kämpfe, K. Biedermann, M. Landwehr, A. Heinig, D. Wang, Y. Shen, K. Bernert, S. Thiem, K. Seidel

Journal title: International Memory Workshop (IMW)

Journal publisher: IEEE

Published year: 2022

DOI identifier: 10.1109/imw52921.2022.9779252