3D mask defect and repair simulation based on SEM images

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Vlad Medvedev, Peter Evanschitzky, Andreas Erdmann

Journal title: SPIE Proceedings

Journal number: Proc. SPIE 12472, 37th European Mask and Lithography Conference, 1247208 (1 November 2022)

Journal publisher: SPIE

Published year: 2022

DOI identifier: 10.1117/12.2637978