Defect detection and classification on semiconductor wafers using two-stage geometric transformation-based data augmentation and SqueezeNet

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Authors: Francisco López de la Rosa, José L. Gómez-Sirvent, Rafael Morales, Roberto Sánchez-Reolid, Antonio Fernández-Caballero

Journal title: Computers & Industrial Engineering

Journal publisher: Pergamon Press Ltd.

Published year: 2023

DOI identifier: 10.1016/j.cie.2023.109549

ISSN: 0360-8352