Bulk Acoustic Wave Based Mocrfluidic Particle Sorting with Capacitive Micromachined Ultrasonic Transducers

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Authors: Shinnosuke Kawasaki, Jia–Jun Yeh, Marta Saccher, Jian Li, Ronald Dekker

Journal title: 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)

Journal publisher: IEEE

Published year: 2022

DOI identifier: 10.1109/mems51670.2022.9699807

ISBN: 978-1-6654-0912-4