Non-monolithic fabrication of thin-film microelectrode arrays on PMUT transducers as a bimodal neuroscientific investigation tool

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Authors: Andrada I. Velea, Joshua Wilson, Astrid Gollhardt, Cyril B. Karuthedath, Abhilash S. Thanniyil, Vasiliki Giagka

Journal title: 45th Int. Conf. of the IEEE Engineering in Medicine and Biology (EMBC) 2023

Journal publisher: IEEE

Published year: 2023