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Authors: Alfredo Mameli, Hylke B. Akkerman, Sandra González-Lana, Héctor Castro-Abril, Kim Le Cann, Angelika Lampert, Gerwin H. Gelinck, Auke Jisk Kronemeijer, Albert J.J.M. van Breemen
Journal title: Microelectronic Engineering, Volume 277, 15 May 2023, 112016
Journal publisher: Elsevier BV
Published year: 2023
DOI identifier: 10.1016/j.mee.2023.112016
ISSN: 0167-9317