Microsecond UV laser annealing annihilating Ru grains smaller than electron mean free path

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Authors: Lu Lu; Nicolas Jourdan; Richard Daubriac; Toshiyuki Tabata; Fabien Roze; Louis Thuries; Fuccio Cristiano; Zsolt Tokei

Journal title: 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM)

Journal publisher: IEEE

Published year: 2023