Top down spectroscopic techniquesfor fast characterization of nanosheet and forksheet devices

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Authors: J. Bogdanowicz, Y. Oniki, K. Kenis, T. Nuytten, S. Sergeant, A. Franquet, V. Spampinato, T. Conard, I. Hoflijk, D. Van den Heuvel, A. L. Charley, P. Leray B. Shamieh, J. Van der Meer, Y. Leon, M. Wormington, Bruker Tech. Ltd J. Hung, R. Koret, D. Fishman, Y. Katz, N. Meir, Nova Measuring Instruments

Journal title: Proceedings Volume PC12053, Metrology, Inspection, and Process Control XXXVI; PC120530G (2022)

Journal publisher: IMEC, NOVA, BRUKER

Published year: 2022

DOI identifier: 10.1117/12.2626316