Automated (S)TEM Metrology Characterization of Gate-All-Around and 3D NAND Devices

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Michael Strauss, Chen Lib, Chris Hakalaa, Xiaoting Gua, Antonio Manib, Zhenxin Zhonga

Journal title: SPIE Proceedings

Journal publisher: SPIE

Published year: 2023