Vertical travelling scatterometry formetrology on fully integrated devices

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: D. Schmidt, M. Medikonda, M. Rizzolo, C. Silvestre, J. Frougier, A. Greene, M. Breton, A. Cepler, J. Ofek, I. Kaplan, R. Koret, I. Turovets

Journal title: Proc. SPIE 12053, Metrology, Inspection, and Process Control

Journal number: XXXVI, 120530S (26 May 2022)

Journal publisher: SPIE (IBM & NOVA)

Published year: 2022