High Rate Deposition of Piezoelectric AlScN Films by ReactiveMagnetron Sputtering from AlSc Alloy Targets on Large Area

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Stephan Barth, Tom Schreiber , Steffen Cornelius , Olaf Zywitzki, Thomas Modes, Hagen Bartzsch

Journal title: micromachines

Journal number: Micromachines 2022, 13

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2022

Published pages: 1561

DOI identifier: 10.3390/mi13101561

ISSN: 2072-666X