Challenges and Perspectives for Vertical GaN-on-Si Trench MOS Reliability: From Leakage Current Analysis to Gate Stack Optimization.

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Authors: Kalparupa Mukherjee; Carlo De Santi; Matteo Borga; Karen Geens; Shuzhen You; Benoit Bakeroot; Stefaan Decoutere; Patrick Diehle; Susanne Hübner; Frank Altmann; Matteo Buffolo; Gaudenzio Meneghesso; Enrico Zanoni; Matteo Meneghini

Journal title: MATERIALS

Journal number: 1

Journal publisher: MDPI Open Access Publishing

Published year: 2021

DOI identifier: 10.3390/ma14092316

ISSN: 1996-1944