AlON gate dielectric and gate trench cleaning for improved reliability of vertical GaN MOSFETs

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Authors: Walter Gonçalez Filho, Matteo Borga , Karen Geens , Deepthi Cingu , Urmimala Chatterjee , Shuzhen You , Benoit Bakeroot , Stefaan Decoutere , Werner Knaepen ; Panagiota Arnou ; Pia Homm

Journal title: CIPS 2022 - 12th International Conference on Integrated Power Electronics Systems

Journal number: 15-17 March 2022

Journal publisher: VDE

Published year: 2022

ISBN: 978-3-8007-5757-2