Root cause analysis of gate shorts in semi-vertical GaN MOSFET devices

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Authors: Patrick Diehle, Susanne Hübner, Carlo De Santi, Kalparupa Mukherjee, Enrico Zanoni, Matteo Meneghini, Karen Geens, Shuzhen You, Stefaan Decoutere, Frank Altmann

Journal title: 2020 13th International Conference on Advanced Semiconductor Devices And Microsystems (ASDAM)

Journal publisher: IEEE

Published year: 2021

DOI identifier: 10.1109/asdam50306.2020.9393835

ISSN: 78-1-7281-9776-0