A new approach for high resolution TEM analysis of electrically active defects in pGaN HEMT devices

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Authors: Patrick Diehle, Frank Altmann, Susanne Hübner, Johannes Bruckmeier, Richard Neumann, and Clemens Ostermaier

Journal title: GaN Marathon 2022

Journal publisher: C.L.E.U.P.

Published year: 2022

ISBN: 9788854955271