Epitaxial growth of vertical GaN device layer stacks on 200 mm engineered substrates

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Authors: Herwig Hahn, Matthias Marx, Robert Oligschlaeger, Dirk Fahle, Hu Liang, Karen Geens, Matteo Borga, Stefaan Decoutere, Vlad Odnoblyudov, Ozgur Aktas, Cem Basceri and Michael Heuken

Journal title: GaN Marathon 2022

Journal publisher: C.L.E.U.P.

Published year: 2022

ISBN: 9788854955271