Strain mapping of semiconductor specimens with nm-scale resolution in a transmission electron microscope

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Authors: David Cooper, Thibaud Denneulin, Nicolas Bernier, Armand Béché, Jean-Luc Rouvière

Journal title: Micron

Journal number: 80

Journal publisher: Pergamon Press Ltd.

Published year: 2016

Published pages: 145-165

DOI identifier: 10.1016/j.micron.2015.09.001

ISSN: 0968-4328