Field mapping of semiconductor devices in a transmission electron microscope with nanometre scale resolution by off-axis electron holography and precession electron diffraction

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: David Cooper, Nicolas Bernier, Jean-Luc Rouviere

Journal title: 2015 IEEE 15th International Conference on Nanotechnology (IEEE-NANO)

Journal publisher: IEEE

Published year: 2015

Published pages: 777-780

DOI identifier: 10.1109/NANO.2015.7388725

ISBN: 978-1-4673-8156-7