Nanoscale Strain Mapping in Embedded SiGe Devices by Dual Lens Dark Field Electron Holography and Precession Electron Diffraction

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Authors: Y. Y. Wang, D. Cooper, J. Rouviere, C.E. Murray, N. Bernier, J. Bruley

Journal title: Microscopy and Microanalysis

Journal number: 21/S3

Journal publisher: Cambridge University Press

Published year: 2015

Published pages: 1963-1964

DOI identifier: 10.1017/S1431927615010594

ISSN: 1431-9276