Combining 2 nm Spatial Resolution and 0.02% Precision for Deformation Mapping of Semiconductor Specimens in a Transmission Electron Microscope by Precession Electron Diffraction

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Authors: David Cooper, Nicolas Bernier, Jean-Luc Rouvière

Journal title: Nano Letters

Journal number: 15/8

Journal publisher: American Chemical Society

Published year: 2015

Published pages: 5289-5294

DOI identifier: 10.1021/acs.nanolett.5b01614

ISSN: 1530-6984