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Authors: R. Berthelon, F. Andrieu, B. Mathieu, D. Dutartre, C. Le Royer, M. Vinet, A. Claverie
Journal title: 2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)
Journal publisher: IEEE
Published year: 2017
Published pages: 91-94
DOI identifier: 10.1109/ULIS.2017.7962609
ISBN: 978-1-5090-5313-1
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