Towards physics-based DTCO for performance of advanced technology nodes

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Authors: Z. Stanojevic, O. Baumgartner, M. Karner, C. Kernstock, H. W. Karner, H. Demel, G. Strof, F. Mitterbauer

Journal title: 2017 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)

Journal publisher: IEEE

Published year: 2017

Published pages: 245-248

DOI identifier: 10.23919/SISPAD.2017.8085310

ISBN: 978-4-86348-610-2