300 mm SiGe-On-Insulator Substrates with High Ge Content (70%) Fabricated Using the Smart Cut  Technology

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Authors: J. Widiez, C. Veytizou, J.-M. Hartmann, V. Loup, P. Besson, N. Baumel, C. Figuet, I. Huyet, F. Mazen, W. Schwarzenbach, C. Tempesta, L. Ecarnot

Journal title: ECS Transactions

Journal number: 75/8

Journal publisher: Electrochemical Society, Inc.

Published year: 2016

Published pages: 79-88

DOI identifier: 10.1149/07508.0079ecst

ISSN: 1938-5862