(Invited) Epitaxial Growth of Low Defect SiGe Buffer Layers for Integration of New Materials on 300 mm Silicon Wafers

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Authors: G. Kozlowski, O. Fursenko, P. Zaumseil, T. Schroeder, M. Vorderwestner, P. Storck

Journal title: ECS Transactions

Journal number: 50/9

Journal publisher: Electrochemical Society, Inc.

Published year: 2013

Published pages: 613-621

DOI identifier: 10.1149/05009.0613ecst

ISSN: 1938-5862