“P-FET Co-Integration on Si and Strained SiGe Dual Channel Substrates Obtained by Ge Local Enrichment Technique”

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Authors: Nguyen, S. Barraud, L. Hutin, C. Tabone, F. Glowacki, J.-M. Hartmann, M.-P. Samson†, L. Ecarnot, B.-Y. Nguyen¤, C. Maleville, C. Mazuré, O. Faynot, M. Vinet

Journal publisher: IWNA Conference 2015

Published year: 2015