Ultra-thin body & buried oxide SOI substrate development and qualification for Fully Depleted SOI device with back bias capability

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Authors: Walter Schwarzenbach, Bich-Yen Nguyen, Frederic Allibert, Christophe Girard, Christophe Maleville

Journal title: Solid-State Electronics

Journal number: 117

Journal publisher: Pergamon Press Ltd.

Published year: 2016

Published pages: 2-9

DOI identifier: 10.1016/j.sse.2015.11.008

ISSN: 0038-1101