Systematic evaluation of SOI Buried Oxide reliability for partially depleted and fully depleted applications

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Authors: W. Schwarzenbach, C. Malaquin, F. Allibert, G. Besnard, B.-Y. Nguyen

Journal title: 2015 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)

Journal publisher: IEEE

Published year: 2015

Published pages: 1-3

DOI identifier: 10.1109/S3S.2015.7333496

ISBN: 978-1-5090-0259-7