Engineered substrates for Moore and more than Moore's law: Device scaling: Entering the substrate era

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Authors: Christophe Maleville

Journal title: 2015 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)

Journal publisher: IEEE

Published year: 2015

Published pages: 1-5

DOI identifier: 10.1109/S3S.2015.7333494

ISBN: 978-1-5090-0259-7