Cobalt MOCVD as a Flexible Process in Semiconductor Industry

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: L. Gerlich, M. Wislicenus, B. Uhlig, S. Riedel, R. Liske

Journal publisher: Proc. Of Functional Integrated nanoSystems (nanoFIS 2016)

Published year: 2016