Micro-Transfer-Printing and Potential Process Optimizations by FEA

Summary

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Authors: Buehler, Kjell; Lorenz, Georg; Mittag, Marcel; Krieger, Uwe; Heise, Niclas; Wicht, Sebastian; Gerbach, Ronny; Naumann, Falk

Journal title: NTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (Eurosime 2019), Hannover, Germany, 24 - 27 March 2019

Journal number: 1

Journal publisher: ZENODO

Published year: 2019

DOI identifier: 10.5281/zenodo.2677535