Characterizing electron beam induced damage in metrology and inspection of advance devices

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Authors: Violeta Navarro, Hamed Sadeghian, Abbas Mohtashami, Ilan Englard, Dror Shemesh, Nitin Singh Malik

Journal title: 33rd European Mask and Lithography Conference

Journal publisher: SPIE

Published year: 2017

Published pages: 17

DOI identifier: 10.1117/12.2279707

ISBN: 9781-510613577