Chemically Stable Atomic-Layer-Deposited Al 2 O 3 Films for Processability

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Authors: Mikael Broas, Olli Kanninen, Vesa Vuorinen, Markku Tilli, Mervi Paulasto-Kröckel

Journal title: ACS Omega

Journal number: 2/7

Journal publisher: AS Omega

Published year: 2017

Published pages: 3390-3398

DOI identifier: 10.1021/acsomega.7b00443

ISSN: 2470-1343