Single-Step CMOS Compatible Fabrication of High Aspect Ratio Microchannels Embedded in Silicon

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Authors: Marta Kluba, Aslihan Arslan, Ronald Stoute, James Muganda, Ronald Dekker

Journal title: Proceedings

Journal number: 1/4

Journal publisher: Eurosensor

Published year: 2017

Published pages: 291

DOI identifier: 10.3390/proceedings1040291

ISSN: 2504-3900