Holistic feedforward control for the 5 nm logic node and beyond

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Authors: Henry Megens, Ralph Brinkhof, Igor Aarts, Haico Kok, Leendertjan Karssemeijer, Gijs ten Haaf, Shawn Lee, Daan Slotboom, Chris de Ruiter, Irina Lyulina, Simon Huisman, Stefan Keij, Evert Mos, Wim Tel, Manouk Rijpstra, Emil Schmitt-Weaver, Kaustuve Bhattacharyya, Robert Socha, Boris Menchtchikov, Michael Kubis, Jan Mulkens

Journal title: Optical Microlithography XXXII

Journal number: 2019

Journal publisher: SPIE

Published year: 2019

Published pages: 18

DOI identifier: 10.1117/12.2515449

ISBN: 9781-510625709