Quantitative tomography with subsurface scanning ultrasound resonance force microscopy

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Authors: Maarten H. van Es, Laurent Fillinger, Hamed Sadeghian

Journal title: Metrology, Inspection, and Process Control for Microlithography XXXIII

Journal publisher: SPIE

Published year: 2019

Published pages: 20

DOI identifier: 10.1117/12.2515048

ISBN: 9781-510625662