High-NA EUV Optics – The key for miniaturization of integrated circuits in the next decade

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Heiko Feldmann, Paul Graupner, Peter Kurz, Winfried Kaiser

Journal title: ESSDERC 2019 - 49th European Solid-State Device Research Conference (ESSDERC)

Journal number: 2019

Journal publisher: IEEE

Published year: 2019

Published pages: 61-63

DOI identifier: 10.1109/essderc.2019.8901696

ISBN: 978-1-7281-1539-9