Substrate optimization for high reliability GaN devices

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Authors: S. Stoffels, K. Geens, X. Li, M. Zhao, M. Borga, E. Zanoni, G. Meneghesso, M. Meneghini, N. Posthuma, M. Van Hove and S. Decoutere

Journal title: MRS2018 Symposium

Journal publisher: Cambridge University Press

Published year: 2018