Strain analysis and dicing defects of GaN on Si substrates

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Authors: D. Poppitz, S. Brand, A. Graff, T. Detzel, O. Häberlen, G. Prechtl, F. Altmann

Journal title: 41st Workshop on Compound Semiconductor Devices and Integrated Circuits Held in Europe

Journal publisher: IUMA

Published year: 2017