CMOS Process-Compatible 200mm polycrystalline AlN Substrates for GaN Power Transistors

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Authors: K. Geens, M. Van Hove, X. Li, M. Zhao, A. Šatka, A. Vincze and S. Decoutere

Journal title: 41st Workshop on Compound Semiconductor Devices and Integrated Circuits Held in Europe

Journal publisher: IUMA

Published year: 2017