Identification of critical regions in AlGaN/GaN-on-Si Schottky barrier diode using Electron beam induced current method

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Authors: J. Priesol, A. Šatka, A. Chvála, S. Stoffels, S. Decoutere

Journal title: Identification of critical regions in AlGaN/GaN-on-Si Schottky barrier diode using Electron beam induced current method

Journal publisher: IUMA

Published year: 2017