Constructing self-consistent validated plasma chemistry

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Authors: S. Rahimi, C. Hill, L. Tse, A. Vibhakar, S. Mohr, J.R. Hamilton, A. Dzarasova, D.B. Brown, J. Tennyson

Journal title: The 38th International Symposium on Dry Process (DPS2016)

Journal publisher: na

Published year: 2016