High-performance SiGe HBTs for next generation BiCMOS technology

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Authors: Holger Rücker, Bernd Heinemann

Journal title: Semiconductor Science and Technology

Journal number: 33/11

Journal publisher: Institute of Physics Publishing

Published year: 2018

Published pages: 114003

DOI identifier: 10.1088/1361-6641/aade64

ISSN: 0268-1242