Prevention of Temperature-Induced Dewetting of Implanted SOI via Heated Ion Implantation

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Authors: Julien Borrel, Alexis Gauthier, Fabien Deprat, Vincent Lu, Francesco Abbate, Sylvain Joblot, Laurent-Renaud Clement, Heloise Tupin, Wei Zou, Edwin Arevalo, Pascal Chevalier, Didier Dutartre

Journal title: 2018 22nd International Conference on Ion Implantation Technology (IIT)

Journal publisher: IEEE

Published year: 2018

Published pages: 29-32

DOI identifier: 10.1109/iit.2018.8807965

ISBN: 978-1-5386-6829-0